MEFS, which stands for "microelectromechanical systems" refers to tiny mechanical devices that can sense, process, and actuate. There are several synonyms for MEFS that can be used interchangeably in different fields. These synonyms include nanoelectromechanical systems (NEMS), micromachines, microsystems technology (MST), micromechanical systems (MMS), and microscale technologies. NEMS and MMS share similar attributes as MEFS, using tiny sensors, actuators, and processors to perform precise functions. Micromachines are similar and refer to small machines or devices that can operate at a small scale. Microscale technologies and MST often refer to the broad field of study of micro and nano devices and technologies, including MEFS and its synonyms.